9 Computer hardware and recorded software systems for the installation, operation, maintenance, and repair of semiconductor manufacturing machines, semiconductor substrates manufacturing machines, semiconductor wafer processing machines; Electronic components, sold separately, for semiconductor manufacturing machines, namely, electrodes, electrostatic chucks, pedestals with signal transmitter, o-rings with readable circuitry antenna or signal transmitter, edge rings with readable circuitry antenna or signal transmitter, mechanisms for sealing with readable circuitry antenna or signal transmitter, electronic calibrator, electric actuators, electric measurement sensors, recorded operating software for operating semiconductor manufacturing machines, electrical controllers, transducers in the nature of electrical transducers and electro-optic transducers, electronic signal transmitters, electronic signal receivers, coaxial cables, fiber optic cables, Pressure and optical sensors, vacuum gauges with electronic sensors and signal transmitters, power supplies electrical, and power cables; Electronic components, sold separately, for semiconductor substrates manufacturing machines, namely, electrodes, electrostatic chucks, pedestals with signal transmitter, o-rings with readable circuitry antenna or signal transmitter, edge rings with readable circuitry antenna or signal transmitter, mechanisms for sealing with readable circuitry antenna or signal transmitter, electronic calibrator, electric actuators, electric measurement sensors, recorded operating software for operating semiconductor substrates manufacturing machines, electrical controllers, transducers in the nature of electrical transducers and electro-optic transducers, electronic signal transmitters, electronic signal receivers, coaxial cables, fiber optic cables, Pressure and optical sensors, vacuum gauges with electronic sensors and signal transmitters, power supplies electrical, and power cables; Electronic components, sold separately, for semiconductor wafer processing machines, namely, electrodes, electrostatic chucks, pedestals with signal transmitter, o-rings with readable circuitry antenna or signal transmitter, edge rings with readable circuitry antenna or signal transmitter, mechanisms for sealing with readable circuitry antenna or signal transmitter, electronic calibrator, electric actuators, electric measurement sensors, recorded operating software for operating semiconductor wafer processing machines, electrical controllers, transducers in the nature of electrical transducers and electro-optic transducers, electronic signal transmitters, electronic signal receivers, coaxial cables, fiber optic cables, Pressure and optical sensors, vacuum gauges with electronic sensors and signal transmitters, power supplies electrical, and power cables; Electronic components, sold separately, for semiconductor wafer processing equipment, namely, electrodes, electrostatic chucks, pedestals with signal transmitter, o-rings with readable circuitry antenna or signal transmitter, edge rings with readable circuitry antenna or signal transmitter, mechanisms for sealing with readable circuitry antenna or signal transmitter, electronic calibrator, electric actuators, electric measurement sensors, recorded operating software for operating semiconductor wafer processing equipment, electrical controllers, transducers in the nature of electrical transducers and electro-optic transducers, electronic signal transmitters, electronic signal receivers, coaxial cables, fiber optic cables, Pressure and optical sensors, vacuum gauges with electronic sensors and signal transmitters, power supplies electrical, and power cables; Downloadable interactive multimedia computer program for the installation, operation, maintenance, and repair of semiconductor manufacturing machines, semiconductor substrates manufacturing machines, semiconductor wafer processing machines; Measurement apparatus and instruments, namely, pressure measuring apparatus and distance measuring apparatus for use in semiconductor manufacturing, semiconductor substrates manufacturing, and semiconductor wafer processing; Equipment in the form of electronic components, sold separately, for semiconductor manufacturing machines, namely, electrodes, electrostatic chucks, pedestals with signal transmitter, o-rings with readable circuitry antenna or signal transmitter, edge rings with readable circuitry antenna or signal transmitter, mechanisms for sealing with readable circuitry antenna or signal transmitter, electronic calibrator, electric actuators, electric measurement sensors, recorded operating software for operating semiconductor manufacturing machines, electrical controllers, transducers in the nature of electrical transducers and electro-optic transducers, electronic signal transmitters, electronic signal receivers, coaxial cables, fiber optic cables, Pressure and optical sensors, vacuum gauges with electronic sensors and signal transmitters, power supplies electrical, and power cables; Equipment in the form of electronic components, sold separately, for semiconductor wafer processing machines, namely, electrodes, electrostatic chucks, pedestals with signal transmitter, o-rings with readable circuitry antenna or signal transmitter, edge rings with readable circuitry antenna or signal transmitter, mechanisms for sealing with readable circuitry antenna or signal transmitter, electronic calibrator, electric actuators, electric measurement sensors, recorded operating software for operating semiconductor wafer processing machines, electrical controllers, transducers in the nature of electrical transducers and electro-optic transducers, electronic signal transmitters, electronic signal receivers, coaxial cables, fiber optic cables, Pressure and optical sensors, vacuum gauges with electronic sensors and signal transmitters, power supplies electrical, and power cables
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