9 Electric sensors for the research and development and manufacturing of micro- and nano-scale materials and coatings; Electronic sensors used in the product optimization, process optimization and production of micro- and nano-scale materials and coatings; Downloadable software for use in the manufacturing, production, and optimization of micro- and nano-scale materials and coatings; Recorded software for use in research and development in the fields of manufacturing, production, and optimization of micro- and nano-scale materials and coatings; Downloadable and recorded software for managing and controlling the manufacturing processes of micro- and nano-scale materials and coatings; Recorded software used in industrial manufacturing processes in the fields of manufacturing, production, and optimization of micro- and nano-scale materials and coatings; Computer hardware for testing and monitoring the manufacturing of micro- and nano-scale materials and coatings