7 Machines and apparatus for the production, alignment, adjustment, linking, coating, development, cleaning, printing, and lithographic treatment, in particular nanostructure imprinting, hot stamping, micro-contact printing, testing, and manufacturing of electronic circuits and semiconductors, in particular transistors and wafers; parts and equipment for machines and apparatus for the production, alignment, adjustment, linking, coating, development, cleaning, printing, and lithographic treatment, in particular nanostructure imprinting, hot stamping, micro-contact printing, testing, and manufacturing of electronic circuits and semiconductors, in particular transistors and wafers, installations for processing semiconductors, namely, severing a substrate, in particular for processing semiconductors under vacuum; installations for conveying semiconductors, namely, belt conveyors; installations and systems for the surface treatment of semiconductors, namely, sputtering devices; installations and systems for etching semiconductor surfaces comprising spray nozzles; installations for vaporizing semiconductor surfaces, in particular under vacuum (CVD processes); installations for conveying, providing, and processing semiconductors, namely, chucks; installations for conveying, processing, and providing photoelectric elements, namely, imprint modules; installations for conveying, processing, and providing flat screens, namely, imprint modules; machines and turnkey production installations for manufacturing semiconductor components from the semiconductor backend sector, and for manufacturing light diodes; machines for semiconductor manufacturing; machines for memory chip manufacturing and memory chip assembly