9 Components for semiconductor manufacturing machines, namely, electrodes, pedestals in the nature of electro-static chuck pedestals being sensors in the nature of pressure sensors for machine chucks, calibration devices for calibrating pressure sensors, electric actuators, electric measurement sensors, recorded operating software for operating semiconductor manufacturing machines, electrical controllers, electronic controller for controlling semiconductor manufacturing machines, transducers in the nature of electrical transducers and electro-optic transducers, electronic signal transmitters, electronic signal receivers, coaxial cables, fiber optic cables, pressure and optical sensors, vacuums being vacuum gauges, tubes being electron tubes and photoelectric tubes, feed lines being connection cables, power supplies, power cables; Components for semiconductor substrates manufacturing machines, namely, electrodes, pedestals in the nature of electro-static chuck pedestals being sensors in the nature of pressure sensors for machine chucks, calibration devices for calibrating pressure sensors, electric actuators, electric measurement sensors, recorded operating software for operating semiconductor substrates manufacturing machines, electrical controllers, electronic controller for controlling semiconductor substrates manufacturing machines, transducers in the nature of electrical transducers and electro-optic transducers, electronic signal transmitters, electronic signal receivers, coaxial cables, fiber optic cables, pressure and optical sensors, vacuums being vacuum gauges, tubes being electron tubes and photoelectric tubes, feed lines being connection cables, power supplies, power cables; Components for semiconductor wafer processing machines, namely, electrodes, pedestals in the nature of electro-static chuck pedestals being sensors in the nature of pressure sensors for machine chucks, calibration devices for calibrating pressure sensors, electric actuators, electric measurement sensors, recorded operating software for operating semiconductor wafer processing machines, electrical controllers, electronic controller for controlling semiconductor wafer processing machines, transducers in the nature of electrical transducers and electro-optic transducers, electronic signal transmitters, electronic signal receivers, coaxial cables, fiber optic cables, pressure and optical sensors, vacuums being vacuum gauges, tubes being electron tubes and photoelectric tubes, feed lines being connection cables, power supplies, power cables; Components for semiconductor wafer processing equipment, namely, electrodes, pedestals in the nature of electro-static chuck pedestals being sensors in the nature of pressure sensors for machine chucks, calibration devices for calibrating pressure sensors, electric actuators, electric measurement sensors, recorded operating software for operating semiconductor wafer processing equipment, electrical controllers, electronic controller for controlling semiconductor wafer processing equipment, transducers in the nature of electrical transducers and electro-optic transducers, electronic signal transmitters, electronic signal receivers, coaxial cables, fiber optic cables, pressure and optical sensors, vacuums being vacuum gauges, tubes being electron tubes and photoelectric tubes, feed lines being connection cables, power supplies, power cables; Computer hardware and recorded software systems for the installation, operation, maintenance, and repair of semiconductor manufacturing machines, semiconductor substrates manufacturing machines, semiconductor wafer processing machines; Downloadable interactive multimedia computer program for the installation, operation, maintenance, and repair of semiconductor manufacturing machines, semiconductor substrates manufacturing machines, semiconductor wafer processing machines; Measurement apparatus and instruments namely, pressure measuring apparatus, distance measuring apparatus for use in semiconductor manufacturing, semiconductor substrates manufacturing, and semiconductor wafer processing
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