37 Repair or maintenance of electronic machines and apparatus; repair or maintenance of integrated circuits manufacturing machines and systems; repair or maintenance of semiconductor manufacturing machines and systems; repair and maintenance of vacuum pumps; cleaning of metals; cleaning of semiconductors; cleaning of semiconductor wafers; cleaning of ceramics; applying of resin coating for others; applying protective, wear-resistant, insulative, chemical resistant, low dust attracting and plasma resistant coatings to glass and quartz; applying protective, wear-resistant, insulative, chemical resistant, low dust attracting and plasma resistant coatings to metal components, in particular the surfaces thereof; applying protective, wear-resistant, insulative, chemical resistant, low dust attracting and plasma resistant coatings to plastic components, in particular the surfaces thereof; applying protective, wear-resistant, insulative, chemical resistant, low dust attracting and plasma resistant coatings to ceramic components, in particular the surfaces thereof; applying protective, wear-resistant, insulative, chemical resistant, low dust attracting and plasma resistant coatings to glass components, in particular the surfaces thereof; applying protective, wear-resistant, insulative, chemical resistant, low dust attracting and plasma resistant coatings to metal; applying protective, wear-resistant, insulative, chemical resistant, low dust attracting and plasma resistant coatings to metal surfaces; applying protective, wear-resistant, insulative, chemical resistant, low dust attracting and plasma resistant coatings to plastics; applying protective, wear-resistant, insulative, chemical resistant, low dust attracting and plasma resistant coatings to plastic surfaces; applying protective, wear-resistant, insulative, chemical resistant, low dust attracting and plasma resistant coatings to ceramics; applying protective, wear-resistant, insulative, chemical resistant, low dust attracting and plasma resistant coatings to ceramic surfaces