7 Vacuum pumps; Vacuum pumps and vacuum pump stations consisting of vacuum pumps; Turbo molecular vacuum pumps; Pumps for machines and vacuum equipment, namely, turbo molecular pumps; Drives and shaft bearings for vacuum pumps; Parts specifically adapted for vacuum pumps and vacuum pump stations, namely, oil separators, condensate separators, dust separators, oil coolers being vacuum engine parts, filters, vapor condensers, flanges being machine parts and mechanical control apparatus being control valves for pumps; Valves being parts of machines; Vacuum installations, comprised primarily of vacuum pumps, and also comprising parts specifically adapted for vacuum pumps, specifically oil separators, condensate separators, dust separators, coolers, filters, vapor condensers, flanges and mechanical control apparatus being control valves for pumps, connecting cables, valves being parts of machines, vacuum containers and process-related work holding fixtures being parts of vacuum pumps; Structural parts for vacuum pumps, namely, vacuum-tight, mechanical and electrical feedthroughs, specifically current feedthroughs, thermocouple feedthroughs, fluid feedthroughs, pipe feedthroughs, rotary feedthroughs, rotary/linear motion feedthroughs, linear motion feedthroughs, all aforementioned being specifically adapted as parts of vacuum pump installations; Structural parts of vacuum pumps and mechanical control apparatus being control valves for pumps for vacuum pumps and vacuum pump stations