7 Machines and structural parts therefor for manufacturing semiconductors, solar cells, light emitting diodes, displays, liquid crystal and organic electroluminescent elements; data recording apparatus being structural parts of machines for manufacturing semiconductors, solar cells, light emitting diodes, display, liquid crystals and organic electroluminescent elements; data transmitting apparatus being structural parts of machines for manufacturing semiconductors, solar cells, light emitting diodes, displays, liquid crystals and organic electroluminescent elements; fluid controllers being structural parts of machines for manufacturing semiconductors, solar cells, light emitting diodes, display, liquid crystals and organic electroluminescent elements; fluid measurement apparatus being structural parts of machines for manufacturing semiconductors, solar cells, light emitting diodes, displays, liquid crystals and organic electroluminescent elements; fluid flow controllers being structural parts of machines for manufacturing semiconductors, solar cells, light emitting diodes, displays, liquid crystals and organic electroluminescent elements; fluid flow meters being structural parts of machines for manufacturing semiconductors, solar cells, light emitting diodes, displays, liquid crystals and organic electroluminescent elements; concentration controllers being structural parts of machines for manufacturing semiconductors, solar cells, light emitting diodes, displays, liquid crystals and organic electroluminescent elements; concentration meters being structural parts of machines for manufacturing semiconductors, solar cells, light emitting diodes, displays, liquid crystals and organic electroluminescent elements; concentration monitors being structural parts of machines for manufacturing semiconductors, solar cells, light emitting diodes, displays, liquid crystals and organic electroluminescent elements; concentration sensors being structural parts of machines for manufacturing semiconductors, solar cells, light emitting diodes, displays, liquid crystals and organic electroluminescent elements; fluid flow sensors being structural parts of machines for manufacturing semiconductors, solar cells, light emitting diodes, displays, liquid crystals and organic electroluminescent elements; pressure controllers being structural parts of machines for manufacturing semiconductors, solar cells, light emitting diodes, displays, liquid crystals and organic electroluminescent elements; pressure meters being structural parts of machines for manufacturing semiconductors, solar cells, light emitting diodes, displays, liquid crystals and organic electroluminescent elements; pressure sensors being structural parts of machines for manufacturing semiconductors, solar cells, light emitting diodes, displays, liquid crystals and organic electroluminescent elements