11 Chambers for use in the disposal of waste materials, namely, combustion chambers, gas handling apparatus being components of a gas abatement system, gas purifiers, gas scrubbers, gas storage/delivery equipment being components of a gas abatement system, in-situ gas generation equipment being components of a gas abatement system, in-line gas stream impurity detection equipment being components of a gas abatement system, wet, dry, thermal, and/or catalytic scrubbers for the treatment of gaseous and/or liquid effluents from manufacturing processes; Installations and apparatus for the treatment, purification and disposal of solid, liquid, and/or gaseous matter being components of a gas abatement system; Water purification units; Water treatment units; Installations and apparatus for igniting, heating, burning and scrubbing gas being components of a gas abatement system; Installations and apparatus for cleaning exhaust gases from the semiconductor industry being components of a gas abatement system; Gas abatement apparatus; Integrated gas pumping and abatement apparatus; Gas scrubbing apparatus; Wet scrubbers; Gas scrubbers being parts of gas installations; industrial scrubbers for removing particulate matter from the air during industrial processing being parts of gas installations; Water cooled traps for the collection or removal of semiconductor process exhaust products; Filter traps for the collection or removal of semiconductor process exhaust products; Gas reactors being components of a gas abatement system; Gas recovery apparatus being components of a gas abatement system; Gas separating apparatus being components of a gas abatement system; and parts and fittings for all the aforesaid goods
Trademark: 88032359
