37 Installation of above mentioned mechanical apparatus, instruments and machines, namely, mechanical apparatus, instruments and machines and installations consisting thereof for the treatment and/or manufacture of semiconductors, silicium, substrates, ingots, solar cells, silicium slices, wafers, compound semiconductors, semiconductor devices, power semiconductors, light-emitting diodes (LED), micromechanical products, namely, MEMS, thin-film-technology products, sensor technology products, nanotechnology products, namely, NEMS and CNT and products from thermally activated processes, vacuum plasma coating apparatus, apparatus and reactors for steam separation on surfaces, namely, CVD-reactors, apparatus, instruments and machines for the supply, conditioning, cleaning and reclaiming of liquids and gases, mechanical apparatus, instruments and machines and apparatus consisting thereof for the mechanical handling, namely, combined robot and conveyor system of semiconductors, substrates, wafers and solar cells, instruments, machines and apparatus consisting thereof, namely, inside conveyor transport system for the transport of semiconductors, substrates, wafers and solar cells at customers and process-related commissioning, namely, putting into service of the above mentioned apparatus, instruments and machines in course of installation for the operation of mechanical apparatus, instruments and machines and for the operation of physical and chemical manufacturing processes as well as for maintenance and customer-specific adaptation, optimization and improvement of the aforementioned products and installation of semiconductors, compound semiconductors, optical measuring and surveying apparatus for quality and process control of the above mentioned mechanical apparatus, instruments and machines
Trademark: 85255571
