9 Optical and electrical measuring devices for the inspection of semiconductor blocks, semiconductor wafers, semi-finished products of the semiconductor industry, thin-film structures and other microstructures, for determining their physical and chemical properties, namely, layer thickness, hardness, dopant and/or contaminant concentration and electrical conductivity, and for detecting surface irregularities, crystal defects and manufacturing defects, and components of said optical and electrical measuring devices; software for controlling measuring devices, evaluating the measurement results, performing related simulations and controlling manufacturing processes