7 Semi-conductor substrates manufacturing machines; vacuum chambers for processing semiconductor substances; sprays for fluid dispensers for semiconductor processing machines; semiconductor wafer processing machines; semiconductor wafer processing equipment; laser cutters for manufacturing semiconductors; multipolar sputtering apparatus for manufacturing LCD, PDP, semiconductor, LCD, solar cells and LED; ion beam sputter evaporation apparatus for manufacturing LCD, PDP, semiconductor, LCD, solar cells and LED; vacuum pumps; gas distributing plate [parts of apparatus for manufacturing semiconductor]; apparatus for manufacturing semiconductors; semiconductor washing equipment; semiconductor manufacturing machines; semiconductor processing machines; laser evaporation/sublimation apparatus being part of machines for manufacturing LCD, PDP, semiconductor, LCD, solar cells and LED; vapor deposition apparatus for semiconductor processing machines; valves [parts of machines]; valves [parts of pumps]; valves other than for land vehicles [parts of machines]