9 Downloadable computer software for controlling chemical delivery systems in the electronics, semiconductor and microelectromechanical industries; electrical controlling devices, namely, electrical process control devices used in the electronics, semiconductor and microelectromechanical industries for the manufacture of electronic devices, namely, logic circuits, memory modules, electrical sensors; electrical process control equipment, namely, downloadable computer software for the monitoring, storage, delivery and management of gases and chemicals for the electronics, semiconductor and microelectromechanical industries; downloadable computer software for monitoring, delivery and dispensing of chemicals, chemical compounds, chemical mechanical planarization slurries, chemical solutions for removing residues and gases in the electronics, semiconductor and microelectromechanical industries; pin grid arrays being integrated circuit modules; integrated circuit modules in the nature of microchip carriers and multi-chip modules; circuit boards; circuit boards and electric conductors; silicon wafers; structured semiconductor wafers beam splitter, namely, optical device for splitting a beam of light