7 Machines for processing semiconductors, solar cells, fibers and other substrates; machines for etching semiconductor surfaces; machines for vaporizing or coating semiconductor surfaces, under vacuum CVD method or atmospherically or under the influence of plasma; machines for conveying goods via atmospheric, subatmospheric, or under a predefined gas atmosphere process, namely, cyclone separators; machines for applying plasma-based coatings; atomic layer deposition machines; mechanical installations and devices for thermal treatment or manufacturing processes, namely, coating installations, annealing installations, installations for vacuum soldering, installations for chemical vapor deposition (CVD installations); machines for thermal layer growth and thermal layer transformations, namely, electrostatic coating machines