9 Inspection devices and systems for the semiconductor, micro-optics and micro-electromechanical systems industries, namely industrial imaging devices for imaging semiconductors, optical frequency metrology devices, profilometers, interferometers, and optical coherence tomography devices, for imaging, inspection, thickness layer measurement, surface profile measurement, critical dimensions measurement, overlay measurement, and process control and characterization; optical inspection systems, devices, and sensors, namely, industrial imaging devices for imaging semiconductors, optical frequency metrology devices, profilometers, interferometers, and optical coherence tomography devices for imaging, dark field and scattering detection, deflectometry, and fluorescence detection; metrology and dimensional control devices and systems for the semiconductor, micro-optics, and micro-electromechanical systems industries, namely, optical frequency metrology devices, profilometers, interferometers, and optical coherence tomography imaging devices; optical metrology sensors, devices, and systems, namely, sensors, devices, and systems comprised of camera, laser, light source, translation and rotation stage, robots, computer, display screen, and frames
Trademark: 79365216
