9 Scientific apparatus and instruments for microelectronics, for medical equipment techniques, biotechnology, microsystem techniques, semiconductor and nanotechnology, namely, exposure systems for 1X lithography applications, namely, mask aligners and contact and proximity printers and devices for joining one or multiple substrates temporarily or permanently, namely, substrate bonding systems comprised of UV-radiation/UV-light source devices, heaters, and pneumatic and hydraulic piston setups and spindles; surveying devices, electric, photographic, optical, measuring, signaling, and monitoring devices, in particular for precision systems in the semiconductor technology, in microelectronics, in medical equipment techniques, biotechnology, microsystem techniques, and nanotechnology, namely, front to backside alignment measurement systems including at least one of measurement apparatus that detects a reference pattern on both the front and on the backside of a substrate and stages that allow for moving the substrate so that the measurement apparatus can detect the pattern at the desired location of the substrate, computer hardware that can analyze the data and calculate misalignment values between the pattern on the front and backside; chips, integrated circuits; downloadable computer operation programs for use in the operation of microelectronics and semiconductor fabrication and processing apparatuses; peripheral equipment for computers; data processing units, data processing devices and computers; downloadable computer software for analyzing wafer bonding results and pattern alignment of substrates; scientific diagnosis devices in bio-chip format, namely, DNA microarrays, microfluidic chips, and protein microarrays comprising oligonucleotide-arrays, miniaturized immunologic test-arrays, substance libraries, combinatorial substance libraries on chip surfaces for scientific purposes; electric systems for remote controlled industrial operational processes, namely, laboratory robots; protective masks and filters therefor for use with photographic and photolithographic equipment and photographic film processing; devices for telecommunications, namely, telegraphic transmitting apparatus, telecopying devices, and telephones; semiconductors; capillary reagent tubes for laboratory use; electric monitoring devices, namely, oscillographs, indicators, and surveying instruments; couplers being data processing equipment; furniture especially made for laboratories; laser for non-medical purposes; reading devices being data processing apparatus; measuring instruments, namely laser measuring devices; measuring devices, namely, laser measuring devices; material testing instruments and machines, namely, machines for testing bonding strength in bonded substrates; optical apparatus and instruments, namely, microscopes; photographic apparatus and instruments, namely, cameras; physical and chemical laboratory apparatus and instruments, namely, metrology tools, debonding tools based on chemical assisted debonding; precision measuring devices for measuring wafter curvatures, wafer warpages, structural misalignments, and run-out errors; projectors, namely, digital micromirror device (DMD) based illumination devices; protective clothing, in particular for protection against accidents in clean-rooms; silicon wafers; probes for scientific purposes; spectroscopes; range finders for photographic equipment
Trademark: 79349418
