9 Measuring, electric and electronic control and regulating apparatus and instruments for controlling coating processes and coating machines, namely, vacuum pressure gauges, gas mass flow controllers, gas mass spectrometers, pressure or position controlled vacuum valves, temperature measurement devices, namely, thermocouples, pyrometers, layer thickness measurement devices, namely optical spectrometers, x-ray fluorescence or x-ray diffraction systems, contact or contact-less resistivity measurement devices, plasma control devices, namely impedance measurement devices, Langmuir probes, plasma emission monitoring systems, lambda sensors; physical laboratory apparatus for treatment of metals in vacuum, namely, heating and/or cooling devices; thermal evaporators; plasma pre-treatment devices, namely, ion beam sources, magnetron based plasma sources, electron beam sources, x-ray sources; magnetrons driven by direct currents or alternating currents at low, mid or high frequencies; downloadable computer software for measuring-, regulating- and control apparatuses for coating machines to conduct coating procedures
Trademark: 79342921
