9 Parts and production equipment of semiconductors for use in the production and processing of materials and parts consisting of high purity substances, namely, for semiconductor technology, computer technology, solar technology in the nature of silicon wafers; carriers for wafers, namely, semiconductor wafers; isostatic graphite material, namely, susceptors in the nature of transport system for silicon wafer processing for epitaxial process; silicon carbide coated material, namely, susceptors in the nature of transport system for silicon wafer processing for epitaxial process; graphite and carbon reinforced carbon products for semiconductor and/or solar applications, namely, susceptors in the nature of transport system for silicon wafer processing made of graphite, carbon reinforced carbon, graphite, silicon carbide, felt material, products made of silicon carbide for use in MOCVD-industry, namely, susceptors for LED production; all the aforementioned goods also being coated with a protective layer to reduce migration of metals