7 Machines and structural parts therefor for manufacturing semiconductors, solar cells, light emitting diodes, displays, liquid crystal and organic electroluminescence elements; automatic controllers being component parts of machines for manufacturing semiconductors, solar cells, light emitting diodes, displays, liquid crystal and organic electroluminescence elements; control apparatus in the nature of automatic controllers being component parts of controlling devices built in machines for manufacturing semiconductors, solar cells, light emitting diodes, displays, liquid crystal and organic electroluminescence elements; fluid controllers being component parts of machines for manufacturing semiconductors, solar cells, light emitting diodes, displays, liquid crystal and organic electroluminescence elements; fluid measurement apparatus being component parts of machines for manufacturing semiconductors, solar cells, light emitting diodes, displays, liquid crystal and organic electroluminescence elements ; fluid flow controllers being component part of machines for manufacturing semiconductors, solar cells, light emitting diodes, displays, liquid crystal and organic electroluminescence elements; fluid flow meters being component parts of machines for manufacturing semiconductors, solar cells, light emitting diodes, displays, liquid crystal and organic electroluminescence elements ; fluid flow sensors being component parts of machines for manufacturing semiconductors, solar cells, light emitting diodes, displays, liquid crystal and organic electroluminescence elements; pressure controllers being component parts of machines for manufacturing semiconductors, solar cells, light emitting diodes, displays, liquid crystal and organic electroluminescence elements; pressure meters being component parts of machines for manufacturing semiconductors, solar cells, light emitting diodes, displays, liquid crystal and organic electroluminescence elements; pressure sensors being component parts of machines for manufacturing semiconductors, solar cells, light emitting diodes, displays, liquid crystal and organic electroluminescence elements