7 Vacuum pumps and vacuum pump stations consisting of vacuum pumps; vacuum pumps and vacuum pump stations composed thereof; drives and shaft bearings for vacuum pumps; parts of vacuum pumps and vacuum pump stations, specifically oil separators, condensate separators, dust separators, filters, vapor condensers, flanges with incorporated coolers and control apparatus that are specially adapted and cannot be used independently; valves being parts of machines; vacuum installations substantially consisting of vacuum pumps and adapted accessories for vacuum pumps that cannot be used independently, specifically oil separators, condensate separators, dust separators, filters, vapor condensers, flanges, valves, vacuum chambers and process-related fixtures as parts of these installations with incorporated coolers, control apparatus, measuring apparatus and connecting cables; machine parts specially adapted for vacuum pump installations, namely, current feedthroughs, thermocouple feedthroughs, fluid feedthroughs, pipe feedthroughs, rotary feedthroughs, rotary/linear motion feedthroughs and linear motion feedthroughs; structural parts for vacuum pumps and vacuum pump stations comprised primarily of vacuum pumps