7 Laser apparatus, namely, a laser machine for semiconductor manufacturing; extreme ultraviolet light generation apparatus, namely, an EUV light generation machine for semiconductor manufacturing; laser processing machines for metalworking, laser processing machines for plastic processing, laser processing machines for rubber processing, laser processing machines for glassware processing, laser processing machines for processing fiber-reinforced composite material made primarily of metal, plastics, rubber or glassware; metalworking machines and machine tools for cutting, forming and heat treating of material; plastic processing machines and machine tools for cutting, forming and heat treating of material; rubber processing machines and machine tools for cutting, forming and heat treating of material; machines and machine tools for processing fiber-reinforced composite material made primarily of metal, plastics, rubber or glassware for cutting, forming and heat treating of material; glassware processing machines and machine tools for cutting, forming and heat treating of material; machines for manufacturing flat panel displays; light source devices for flat panel display manufacturing machines, namely, laser machine and EUV light generation machine; machines for manufacturing plasma displays; light source devices for manufacturing plasma displays, namely, laser machine and EUV light generation machine; machines for manufacturing liquid crystal displays (LCD); light source devices for liquid crystal display (LCD) manufacturing machines, namely, laser machine and EUV light generation machine; machines for manufacturing organic electroluminescence (EL) displays; light source devices for organic electroluminescence (EL) display manufacturing machines, namely, laser machine and EUV light generation machine; lithography machines for manufacturing semiconductors; light source devices for lithography equipment for manufacturing semiconductors, namely, laser machine and EUV light generation machine; vacuum deposition apparatus, namely, a machine for thin film fabrication; light source devices for vacuum deposition apparatus, namely, laser machine and EUV light generation machine; thin film generation systems comprised of, laser machine and EUV light generation machine; light source devices for thin film generation apparatus, namely, laser machine and EUV light generation machine; machines for manufacturing touch panels; light source devices for touch panel manufacturing machines, namely, laser machine and EUV light generation machine; light source devices for printing machines, namely, laser machine and EUV light generation machine