7 Machines and machine tools, in particular vacuum treatment installations, in particular vacuum coating or vacuum etching installations; machine tools for use in mechanical engineering for surface treatment of all kinds, in particular mechanical engineering tools for chemical and physical cleaning, structuring or layer-removal and mechanical treatment, in particular of substrates to be coated in a vacuum installation; coating machines of all kinds, in particular coating machines for producing thin layers, coating sources of all kinds, in particular evaporation sources, electron beam vaporisers, ionic beam sources, ionic beam sputter sources, PVD, CVD, PECVD sources, cathode atomisation sources and plasma sources; apparatus for modifying the surfaces of objects, in particular coating by sputtering, evaporation, dry etching, plasma treatment, ion beam treatment and spin coating; machine installations for manufacturing solar installations for generating electricity, in particular solar modules, solar generators and inverters; machine installations for manufacturing photovoltaic devices for generating electricity and installations formed therefrom and component parts and replacement parts therefor; machine installations for manufacturing electronic control devices for thermal and photovoltaic and solar installations; machine installations for manufacturing electric accumulators, installations for manufacturing electric batteries, machine installations for manufacturing semi-conductors, integrated circuits, electric collectors; machine installations for manufacturing solar cell modules or solar cells for generating electricity; machines, in particular apparatus for producing surface layers on instruments of all kinds, in particular spectacle lenses, lenses, mirrors, optical or electric filters, reflectors for automobiles, telescopes, lasers, evaporation coaters, batch evaporators, batch sputtering systems, inline sputtering systems, cluster tools and combinations thereof; Integral components for machine installations, in particular, architectural glass, solar cell substrates or modules, display substrates or modules, in particular computer screens, luminous layers, organic light-emitting diodes