9 Apparatus and instruments for physics or chemistry, namely, electrical apparatus and installations composed thereof for treatment of surfaces using a vacuum process or a plasma process; apparatus and instruments for physics or chemistry, namely, devices and apparatus for coating or treatment of surfaces using a vacuum process or a plasma process, in particular for vapour deposition, sputtering, ion implanting, and glow discharge supported deposition of solid layers from the gaseous phase; parts of apparatus and instruments for physics or chemistry, namely of devices and apparatus for coating or treatment of surfaces using a vacuum process or a plasma process, in particular vacuum chambers, electron emitters, generator chambers, arrangements of cathodes or crucibles, electron beam physical vapor deposition systems, resistance heated vaporizers, apparatus and instruments for physics or chemistry for supplying vacuum chambers with process gas, electrical monitoring units, electrical control apparatus; material testing instruments and machines; electronic publications, downloadable; magnetic data media; compact discs (read-only memory)
Trademark: 79114864
