7 MACHINES FOR INDUSTRIAL ENGINEERING AND MANUFACTURING, NAMELY, SEMICONDUCTOR MANUFACTURING MACHINES, DATA STORAGE MEDIA, PHOTOVOLTAIC CELL, APPARATUS FOR APPLYING PROTECTIVE COATINGS; MACHINE TOOLS, NAMELY, TOOLS FOR CUTTING, FORMING AND MOLDING; APPARATUS FOR APPLYING WEAR RESISTANT COATINGS ON TOOLS FOR METAL PROCESSING; COATING MACHINES FOR OPTICAL AND MAGNETIC DATA STORAGE MEDIA; SURFACE TREATMENT MACHINES FOR COATING AND ETCHING OF COMPONENTS AND MONITORS; VACUUM COATING COMPONENTS AND SPARE PARTS (INCLUDED IN THIS CLASS), NAMELY VACUUM DUCTS, VACUUM VALVES, VACUUM REVERSING DEVICES, CONTROL UNITS, SUBSTRATE CARRIERS; VACUUM PUMPS; ROTARY VACUUM PUMPS, PROPELLANT PUMPS; CONDENSATION VACUUM PUMPS; SORPTION PUMPS; PARTS OF VACUUM CHAMBERS, NAMELY, VACUUM BLOCKING SLIDES, VACUUM VALVES, VACUUM CONNECTIONS AND VACUUM CHAMBERS COMPONENTS; DUST VACUUM SEPARATORS, OIL SEPARATORS; FILTERS FOR VACUUM PUMPS; VACUUM SEALING MACHINES; MACHINES FOR LOW-TEMPERATURE ENGINEERING; SURFACE TREATMENT MACHINES FOR OPERATION UNDER COARSE VACUUM, FINE VACUUM, HIGH VACUUM AND ULTRA-HIGH VACUUM; VACUUM MACHINES FOR DEGASSING, FILLING, IMPREGNATING, MIXING, MELTING, ATOMIZING, VAPORIZING, EVAPORATION COATING OR COATING OF MATERIALS; VACUUM HEAT TREATING MACHINES FOR METALS; VACUUM COATING MACHINES FOR OPTICAL AND MAGNETIC DATA STORAGE MEDIA; ELECTRIC ENERGY SUPPLY GENERATORS FOR SPACE EQUIPMENT, SPACE PROBES, SPACE STATIONS, SPACE LABORATORIES AND SATELLITES, SUBSTANTIALLY CONSISTING OF MERCURY VAPOR TURBINES HEATED BY BUNDLED SUNRAYS, AUTOMATIC ASSEMBLY MACHINES FOR THE SEMICONDUCTOR INDUSTRY; PRODUCTION MACHINES FOR THE MANUFACTURE OF FLAT SCREENS; ULTRASONIC CLEANING MACHINES FOR SUBSTRATES WHICH ARE TO BE COATED IN A VACUUM APPARATUS; MACHINES AND MACHINE TOOLS; COATING MACHINES FOR TOOLS AND COMPONENTS; COATING MACHINES FOR OPTICAL AND MAGNETIC DATA STORAGE MEDIA; SURFACE TREATMENT MACHINES FOR COATING ETCHING OF COMPONENTS AND MONITORS; VACUUM COATING COMPONENTS AND SPARE PARTS INCLUDED IN THIS CLASS, NAMELY VACUUM DUCTS, VACUUM VALVES, VACUUM REVERSING DEVICES, CONTROL UNITS, SUBSTRATE CARRIERS; VACUUM PUMPS; ROTARY VACUUM PUMPS, PROPELLANT PUMPS; CONDENSATION VACUUM PUMPS; SORPTION PUMPS; PARTS OF VACUUM CHAMBERS, NAMELY VACUUM BLOCKING SLIDES, VACUUM VALVES, VACUUM CONNECTIONS AND VACUUM CHAMBERS COMPONENTS; SEPARATORS; FILTERS FOR VACUUM PUMPS; VACUUM SEALING MACHINES FOR GREASES, CEMENTS AND LACQUERS, MACHINES FOR LOW-TEMPERATURE ENGINEERING; SURFACE TREATMENT MACHINES FOR OPERATION UNDER COARSE VACUUM, FINE VACUUM, HIGH VACUUM AND ULTRA-HIGH VACUUM; VACUUM MACHINES FOR DEGASSING, FILLING, IMPREGNATING, MIXING, MELTING, ATOMIZING, VAPORIZING, EVAPORATION COATING OR COATING OF MATERIALS; VACUUM HEAT TREATING MACHINES FOR METALS; VACUUM COATING MACHINES FOR OPTICAL MAGNETIC DATA STORAGE MEDIA; ELECTRIC ENERGY SUPPLY GENERATORS FOR SPACE EQUIPMENT, SPACE PROBES, SPACE STATIONS, SPACE LABORATORIES AND SATELLITES, SUBSTANTIALLY CONSISTING OF MERCURY VAPOR TURBINES HEATED BY BUNDLED SUNRAYS, AUTOMATIC ASSEMBLY MACHINES FOR THE SEMICONDUCTOR INDUSTRY; PRODUCTION MACHINES FOR THE MANUFACTURE OF FLAT SCREENS; ULTRASONIC CLEANING MACHINES FOR SUBSTRATES WHICH ARE TO BE COATED IN A VACUUM APPARATUS; ENGINES FOR SPACE VEHICLES, IN PARTICULAR RECOIL ENGINES, RAMJET ENGINES, SOLID-PROPELLANT AND LIQUID- PROPELLANT, ROCKET ENGINES, GAS TURBINE ENGINES AND ION DRIVE ENGINES (FOR SPACECRAFTS); PARTS OF ENGINES, LACQUERS VACUUM COATING EQUIPMENT, NAMELY SPUTTERING CATHODES FOR EVAPORATION AND SPUTTERING OF MATERIALS FOR OPTICALLY FUNCTIONAL SURFACES, VACUUM MACHINES FOR DRYING, FREEZE-DRYING