9 Equipment for use in microlithography; apparatus and instruments for use in the field of electronics, microlithography, semi-conductors, integrated circuits, magnetic domain memory and integrated optical systems; parts and fittings for the aforementioned goods, not included in other classes; software for use in the field of electronics, microlithography, semi-conductors, integrated circuits, magnetic domain memory and integrated optical systems; software for the design, testing and fabrication of photolithographic masks; semi-conductors; integrated circuits; photolithographic masks; magnetic heads, chips, gene chips, LCDs, display screens, magnetic domain memories, integrated optical systems