9 International Class: G 009 A (Flowmeter) Goods: ElectroMechanical Fluid (Gas or Liquid) Computer Controlled, Intelligent Fluid Distribution and Control System, used for controlling Gases or Liquids or both in Semiconductor, Fiber optics, Medical, Industrial, PetroChem, industries and or any industry using gas and or liquid flow metering, measuring and control. GasLogic will allow insitu diagnostics, redundant spares and measurement insitu, reconfigurability ie; gas and or flow change, with all electromechanical devices controlled remotely via cabling, rs-485, rs-422, DevicenetTM, LonWorksTM, EthernetTM, FirewireTM, Infrared, Analog, for gas and or liquid flow panel devices including but not limited to, Mass Flow Controllers/Meters, Pressure Transducers/Sensors, Pressure Regulators, Temperature Sensors, Interlocks and pneumatic drive controls (actuators). Primary use will be for Semiconductor Gas/Liquid Process Control for Semiconductor Manufacturing, Test, Cleaning Machines, including but not limited to, Diffusion (all, Etch (all), CVD and PVD (all), ThinFilms (all), Wet Cleans (all), testing (all), CMP (all), Wafer Handling (all) - all Semiconductor mfg processes where gas/liquid flow measurement/metering/control is used.
Trademark: 78097253
