37 Installation, maintenance and repair of semiconductor processing machines and systems; Installation, maintenance and repair of semiconductor wafer processing machines; Installation, maintenance and repair of atomic layer deposition (ALD) machines; Installation, maintenance and repair of chemical Vapor Deposition (CVD) machines; Installation, maintenance and repair of ultra high vacuum chemical vapor deposition (CVD) machines; Installation, maintenance and repair of low pressure chemical vapor deposition (CVD) machines; Installation, maintenance and repair of metal organic chemical vapor deposition (CVD) machines; [ Installation, maintenance and repair of rapid thermal chemical vapor deposition (CVD) machines; Installation, maintenance and repair of high temperature chemical vapor deposition (CVD) machines; Installation, maintenance and repair of atmospheric pressure chemical vapor deposition (CVD) machines; Installation, maintenance and repair of middle pressure chemical vapor deposition (CVD) machines; Installation, maintenance and repair of diffusion machines used for semiconductor manufacturing; ] Installation, maintenance and repair of plasma enhanced chemical vapor deposition (PECVD) machines; Installation, maintenance and repair of plasma chemical vapor deposition (PCVD) machines; [ Installation, maintenance and repair of vapor epitaxial growth machines used for semiconductor manufacturing; Installation, maintenance and repair of liquid epitaxial growth machines used for semiconductor manufacturing; Installation, maintenance and repair of oxidation machines used for semiconductor manufacturing; Installation, maintenance and repair of Anealing machines used for semiconductor manufacturing; ] Installation, maintenance and repair of deposition machines used for semiconductor manufacturing; [ Installation, maintenance and repair of etching machines used for semiconductor manufacturing; Installation, maintenance and repair of sputtering machines used for semiconductor manufacturing; Installation, maintenance and repair of photolithography machines used for semiconductor manufacturing; Installation, maintenance and repair of developing machines used for semiconductor manufacturing; Installation, maintenance and repair of ashing machines used for semiconductor manufacturing; Installation, maintenance and repair of cleaning machines used for semiconductor manufacturing; Installation, maintenance and repair of polishing machines used for semiconductor manufacturing; ] Installation, maintenance and repair of deposition machines used for liquid crystal display (LCD) manufacturing; [ Installation, maintenance and repair of etching machines used for liquid crystal display (LCD) manufacturing; Installation, maintenance and repair of sputtering machines used for liquid crystal display (LCD) manufacturing; Installation, maintenance and repair of photolithography machines used for liquid crystal display (LCD) manufacturing; Installation, maintenance and repair of developing machines used for liquid crystal display (LCD) manufacturing; Installation, maintenance and repair of ashing machines used for liquid crystal display (LCD) manufacturing; Installation, maintenance and repair of cleaning machines used for liquid crystal display (LCD) manufacturing; Installation, maintenance and repair of polishing machines used for liquid crystal display (LCD) manufacturing; ] Installation, maintenance and repair of deposition machines used for solar cells manufacturing; Installation, maintenance and repair of etching machines used for solar cells manufacturing [ ; Installation, maintenance and repair of sputtering machines used for solar cells manufacturing; Installation, maintenance and repair of photolithography machines used for solar cells manufacturing; Installation, maintenance and repair of developing machines used for solar cells manufacturing; Installation, maintenance and repair of ashing machines used for solar cells manufacturing; Installation, maintenance and repair of cleaning machines used for solar cells manufacturing; Installation, maintenance and repair of polishing machines used for solar cells manufacturing ]