2 COATINGS APPLIED TO SUBSTRATES; NAMELY, THIN FILM COATINGS,LUBRICATION COATINGS, WETTING LAYER COATINGS, ANTI-STICTION COATINGS, COUPLING AGENT COATINGS, BONDING AGENT COATINGS, ADHESION LAYER COATINGS, SURFACE MODIFYING COATINGS, MONOLAYER DEPOSITION COATINGS, NANOFILM DEPOSITION COATINGS, AND RELEASE LAYER COATINGS, APPLIED TO SUBSTRATES, NAMELY, SENSORS, ACTUATORS, SWITCHES, RF-MEMS, MICRO-OPTIC DEVICES, NANOIMPRINTS, AND OTHER MICROSTRUCTURES