9 Semiconductor wafer processing equipment and operational software and components for such equipment, namely, wafer processing equipment in the nature of epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanters, measuring and monitoring tools, and chemical mechanical polishers; all such equipment used for the processing and production of semiconductor substrates, thin films, silicon discs and wafers
Trademark: 76402571
