42 SemiNet's SMART Control system is a flexible software/hardware solution that offers real time control and monitoring of your tool, while maintaining uniformity across your wafer and process Using a series of distributed hardware, data is continuously monitored and collected throughout the process and reported back to the GUI (Graphical User Interface) and Fab server, while automatically making all the proper adjustments necessary to maintain tool repeatability In addition, by setting certain limits for your process, SMART Control's advanced fault detection can compare current or future wafer runs with past ones to determine if a fault has occurred or is likely to occur SMART Control will provide the OEM of the process tool e-diagnostics capabilities to remotely monitor and control there process tool at the fab location SMART Control is the only model in today's market designed to monitor, control and integrate with every aspect of your process tool Which include-- - Front End Wafer handling 200/300mm - Mini-Environment - Process tool - Facilities interface
Trademark: 76299215
