9 Microsystems comprising-- micromachined devices for sensing conditions or events, actuating other systems and devices, and spraying fluids; micro electromechanical systems composed of micromachined devices for sensing conditions or events, actuating other systems and devices, or spraying fluids, and packaging; and microstructures; namely, sensors, actuators, transducers, pressure sensors, spray atomizers, and polymeric, ceramic, metallic, plastic and glass packaging for sensors, actuators and transducers