9 COMPUTER SOFTWARE FOR SEMICONDUCTOR WAFER PROCESSING EQUIPMENT USED IN THE PROCESSING AND PRODUCTION OF SEMICONDUCTOR SUBSTRATES, THIN FILMS, SILICON DISCS AND WAFERS; NAMELY, EPITAXIAL REACTORS, CHEMICAL VAPOR DEPOSITION REACTORS, PHYSICAL VAPOR DEPOSITION REACTORS, PLASMA ETCHERS, ION IMPLANTERS, AND CHEMICAL MECHANICAL POLISHERS