9 Micro-optical components, micro-ball lenses, micro-lenses, optical switches, optical filters, tunable optical filters, micro-optical assemblies, fiber optic assemblies, micro-optical modules for fiber optic networks and systems, micro-optic interferometers, micro-optic wavefront sensors and micro-optic assembly equipment, distance measuring interferometers including laser heads, interferometers, processing electronics, atmospheric insensitive distance measuring interferometers including laser heads, interferometers, processing electronics, reticle critical dimension measuring equipment in-process silicon wafer surface topography measuring equipment, optical data storage heads and drives, surface metrology equipment for the measurement of magnetic hard disk drive heads (sliders), surface topography equipment for the measurement of magnetic rigid disk drive disks
Trademark: 76073872
