7 MACHINES AND MACHINE TOOLS, NAMELY VACUUM SYSTEMS AND PLASMA PROCESS SYSTEMS, IN PARTICULAR FOR PRODUCTION OF PRINTED CARDS- ETCHING, CLEANING, PVD AND CVD SYSTEMS, IN PARTICULAR FOR METALLIZATION PROCESSES- COMPLETELY AUTOMATIC PRODUCTION LINES FOR PRODUCTION OF PRINTED CARDS AND CHIP CARRIERS AS WELL AS COMPONENTS AND SPARE PARTS FOR THE ABOVE MENTIONED SYSTEMS