42 TECHNICAL AND SCIENTIFIC RESEARCH AND DEVELOPMENT IN THE FIELD OF CHEMICAL SUBSTANCES IN AQUEOUS- OR VAPOUR PHASE, CONTAINING WATER, OZONE AND ADDITIVES, OR WATER AND OZONE, AND IN THE FIELD OF MICRO-ELECTRONICS, FOR COMPOSING METHODS OR DESIGNING EQUIPMENT FOR THE REMOVAL OF ORGANIC CONTAMINATION OR FOR THE FORMATION OF OXIDE LAYERS ON SEMICONDUCTOR WAFERS, SEMICONDUCTOR SUBSTRATES AND FLAT PANEL DISPLAYS