9 Components and spare parts for vacuum deposition installations, namely, electronic control and power regulating switches; apparatus for measuring total pressure in vacuum installations, namely, total pressure sensors, measuring meters, and electronic control connectors; partial pressure measuring monitors and sensors for vacuum installations; gas chromatography apparatus for determining the gas composition at low and high pressures; electronic leak detectors for detecting leaks in vacuum containers and airtight containers; electronic chip carrier cleaners for cleaning the surface of electronic components; ultrasonic cleaning devices for substrates to be coated in a vacuum installation; and laboratory or electronic fabrication equipment, namely, sputter cathodes, sputter targets, sputter screens, sputter masks, vapor filaments, evaporation boats, ceramic crucibles, and quartz crystals