9 SEMICONDUCTOR WAFER PROCESSING EQUIPMENT, OPERATIONAL SOFTWARE, AND COMPONENTS, NAMELY, EPITAXIAL REACTORS, CHEMICAL VAPOR DEPOSITION REACTORS, PHYSICAL VAPOR DEPOSITION REACTORS, PLASMA ETCHERS, ION IMPLANTERS, AND CHEMICAL MECHANICAL POLISHERS; ALL FOR THE PROCESSING AND PRODUCTION OF SEMICONDUCTOR SUBSTRATES, THIN FILMS, SILICON DISCS AND WAFERS