9 Metrology and inspection systems for integration into semiconductor wafer, magnetic read-write head, and flat panel display processing and related equipment; such as, but not limited to, chemical mechanical polishers, chemical vapor deposition reactors, physical vapor deposition reactors, rapid thermal processors, wet and dry etchers, epitaxial reactors, ion implanters, material handlers, lithography track and exposure systems, and assemblies thereof
Trademark: 75702212
