9 SEMICONDUCTOR SUBSTRATES AND WAFERS, FOR USE IN FLAT PANEL DISPLAYS, INTEGRATED OPTICAL WAVE GUIDES AND SENSORS; MICROMACHINERY COMPONENTS, NAMELY, MICRO ELECTRONIC MECHANICAL SYSTEMS COMPRISED OF MEMBRANES, POUTRES, TRANSISTORS, THERMOCOUPLES, OPTOGUIDES, CAVITIES, GAUGES, LENSES, ACCELEROMETERS, GUIDES, SENSORS, RESISTORS, SUSPENDED BRIDGES, MIRRORS, FOR USE IN THE MANUFACTURE OF INTEGRATED CIRCUITS