9 replacement parts for vacuum deposition machines, namely controlling and regulating units; total pressure gauges, measuring and control apparatuses for vacuum systems; partial pressure measuring apparatuses for vacuum machines; gas analysis apparatus for determining the gas composition in vacuum machines at low and at high pressures; leak detectors for detecting leaks in vacuum and in air tight containers; Chip carrier cleaners for surface cleaning of electronic components, ultra sonic cleaning apparatuses for substrates to be coated in a vacuum system, accessories for the thinfilm technology, namely, sputtering cathodes, sputtering targets, sputtering shields, sputtering masks, evaporation filaments, evaporation boats, ceramic crucibles, quartz crystals, laser pointers for presentations