9 controllers; powerline carrier apparatus; remote control and telemetering apparatus for remote metering; applied electronic machinery and apparatus and parts therefor, namely, geiger counter apparatus, cyclotron, industrial X-ray apparatus, industrial betatron, shield case for magnetic disks, electrostatic process copying machine, desk calculator, word processor, semiconductor device, electronic circuit; computers; computer memories; computer keyboards; computer operating programs recorded; computer peripherals; computer programs for use in fabrication of semiconductor/liquid crystal, and research on semiconductor/liquid crytal, specifically to perform (A) a function for monitoring operating conditions or semiconductor/liquid crystal fabricating equipment, (B) a function for managing a recipe to determine operations of the semiconductor/liquid crystal fabricating equipment, (C) a function for sequence control for controlling a flow of wafers/glass substrates in the semiconductor/liquid crystal fabricating equipment, and a function for sequence control for accessory apparatus, (D) a function for communication for exchange of information between the semicouductor/liquid crystal fabricating equipment and a host computer, (E), a function for managing events/alarms occurring in the semiconductor/liquid crystal fabricating equipment, (F) a function for managing data in the semiconductor/liquid crystal fabricating equipment, such as data on consumption of material used in the equipment, (G) a function for managing process data during operation of the semiconductor/liquid crystal fabricating equipment, and (H) a function of defining various data directed to a specified device to achieve the above-mentioned functions; control processing units; blank magnetic disks; blank compact disks; or pre-recorded magnetic disks and compact disks featuring (A) a function for monitoring operating conditions or semiconductor/liquid crystal fabricating equipment, (B) a function for managing a recipe to determine operations of the semiconductor/liquid crystal fabricating equipment, (C) a function for sequence control for controlling a flow of wafers/glass substrates in the semiconductor/liquid crytal fabricating equipment, and a function for sequence control for accessory apparatus, (D) a function for communication for exchange of information between the semiconductor/liquid crystal fabricating equipment and a host computer, (E) a function for managing events/alarms occurring in the semiconductor/liquid crystal fabricating equipment, (F) a function for managing data in the semiconductor/liquid crystal fabricating equipment, such as data on consumption of material used in the equipment, (G) a function for managing process data during operation of the semiconductor/liquid crystal fabricating equipment, and (H) a function of defining various data directed to a specified device to achieve the above-mentioned functions; data processing apparatus; monitors; and monitoring apparatus for recovering from various error situations in token ring applications, for transmitting or recording continual measurements by signal, and for system operation
Trademark: 75339157
