9 lithographic and implanting machines, and parts thereof, for use in producing images and in printing or implanting images on wafers and other substrates; electron-beam columns and electron-beam systems, and parts thereof, for use in the production of semiconductors; reticles and masks for use with lithographic and implanting machines, and electron-beam columns and systems; computer software for use in the operation of lithographic, implanting, heat treating, cleaning, etching, implanting and leveling machines, and electron-beam columns and systems; tooling for lithographic machines and electron-beam columns and systems; and operating manuals and computer software sold as a unit with lithographic machines, and electron-beam columns and systems